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科学研究 Scientific Research 研究方向为微机电系统（MEMS）技术，主要从事微纳传感器与执行器、应用微系统以及微纳检测技术等领域的研究工作，面向飞行器外部流场的流动参数测量与控制以及发动机内流场高温参数测量等工程需求，开展流体壁面剪应力传感器技术及测试仪器、发动机高温参数测量用特种微传感器技术、主动流动控制微致动器及智能结构技术以及冰摩擦力测量微传感器技术等研究。主持及参与国家自然科学基金、973计划、国家重大科学仪器设备开发专项、国防基础研究计划等国家级项目以及多项省部级、重要横向课题等项目。发表论文50余篇，获授权发明专利20余项。

教育教学

学术成果 Academic Achievements 1. Deng  Jinjun, Zheng Shaojun, Yan  Yuchao. Fabrication and static calibration of double-layer thermal film sensor for fluid wall shear stress measurement. Journal of Micromechanics And Microengineering. 2020,30(11). 2. Deng Jinjun*, Zhang Linwei, Hui Liuan, Jin Xinhang, Ma Binghe, Indium Tin Oxide Thin-Film Thermocouple Probe Based on Sapphire Microrod, Sensors, 2020, 20(5): 1289.3. Deng Jinjun*, Wang Weihua, Hui  Liuan, Zhang  Jietong, Jin, Xinhang, A Through-Hole Lead Connection Method for Thin-Film Thermocouples on Turbine Blades , Sensors, 2019, 19(5): 1155.4. Jiang Chengyu*, Deng Jinjun*,Ma Binghe, Yuan Weizheng, Advanced flow measurement and active flow control of aircraft with MEMS, Engineering Sciences , 2012, 10(5): 26-32.5. 邓进军*,李凯,王云龙, 金新航,马炳和, 航空发动机内壁高温测试技术, 微纳电子技术, 2015, 52(03): 178-1846. Xinhang Jin, Binghe Ma*, Jinjun Deng*, et.al, High temperature failure modes of In2O3 thin films and improved thermal stability using Al2O3/ZrO2 protective layers, Ceramics International, 2021, 47(20):28411-284187. Sun B., Ma B., Deng J., et. al, High sensitive micro flexible thermal sensor for flow separation measurements on airfoil，20th International Conference on Solid-State Sensors，Berlin, Germany，JUN 23-27, 20198. Ding G., Ma B., Deng J., et. al, Temperature drifts of the floating element wall shear stress sensor with capacitive sensing，20th International Conference on Solid-State Sensors，Berlin, Germany，JUN 23-27, 20199. Sun B.,Wang P., Ma B., Deng J., et. al, Effects of annealing on the temperature coefficient of resistance of nickel film deposited on polyimide substrate, Vacuum, 2019,160:18-2410. Wang Sh., Ma B., Deng J., et. al, Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film, Microsystem Technologies, 2015,21(5):1053-105911. Gao W., Ma B., Luo J., Deng J., High sensitive Polyimide-based single-walled carbon nanotube thermal film sensor for fluid shear stress measurements, Smart Materials And Structures, 2019,28(7)12. Ma C., Ma B., Deng J., et.al, A High-Temperature MEMS Surface Fence for Wall-Shear-Stress Measurement in Scramjet Flow, Sensors, 2017,17(10).13. Lv H., Jiang C., Hou H., Zhou Z., Deng J., et. Al, Flexible balloon actuators for active flow control, Microsystem Technologies, 2012,18(3):265-275.

荣誉获奖

荣誉获奖 Awards Information 国家技术发明二等奖2项，省部级科技奖励7项。

科学研究

社会兼职 Social Appointments 中国微米纳米技术学会微纳执行器与微系统分会理事。

学术成果

综合介绍